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CRDB_PT0005

Publication No.EP0298393
CRDB IDCRDB_PT0005
TitleProcess for producing negative images from positive photoresists containing curcumin and a light-sensitive material containing curcumin
CountryEurope
Publication Date11.01.1989
International Classification G03F 7/08
Application No.88110552
Applicant HOECHST CELANESE CORPORATION
InventorSANGYA, JAIN
Google Patent Link EP0298393
AbstractThe present invention relates to a process for the production of negative images from a positive-working photoresist. A photosensitive mixture, consisting essentially of a water-insoluble resin, which is soluble in alkaline solvents, 1,2-quinone-2-diazide-4- and ?5-sulfonic esters, a crosslinking agent which acts in the presence of acid and the dye curcumin in a solvent is prepared. After application of the solution to a substrate and evaporation of the solvent, imagewise exposure is carried out, and the photosensitive layer is heated and the unexposed parts are removed by development. The photosensitive mixture according to the invention exhibits high resolution of the developed image and high photosensitivity.